2022 Phenomenology-based Model Predictive Control of Electron Density in Ar/SF6 Capacitively Coupled Etch Plasma 본문 Author 김곤호 Journal Journal of the Korean Physical Society Year 2022 DOI professor 수정 삭제 검색 목록 이전글Development of neutron time-of-flight measurement system for 1.7-MV tandem proton accelerator with lithium target 22.04.22